JPH0518880Y2 - - Google Patents
Info
- Publication number
- JPH0518880Y2 JPH0518880Y2 JP7891585U JP7891585U JPH0518880Y2 JP H0518880 Y2 JPH0518880 Y2 JP H0518880Y2 JP 7891585 U JP7891585 U JP 7891585U JP 7891585 U JP7891585 U JP 7891585U JP H0518880 Y2 JPH0518880 Y2 JP H0518880Y2
- Authority
- JP
- Japan
- Prior art keywords
- deflector
- charged body
- tantalum
- charged
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- CIJJJPBJUGJMME-UHFFFAOYSA-N [Ta].[Ta] Chemical compound [Ta].[Ta] CIJJJPBJUGJMME-UHFFFAOYSA-N 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7891585U JPH0518880Y2 (en]) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7891585U JPH0518880Y2 (en]) | 1985-05-27 | 1985-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61193700U JPS61193700U (en]) | 1986-12-02 |
| JPH0518880Y2 true JPH0518880Y2 (en]) | 1993-05-19 |
Family
ID=30623336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7891585U Expired - Lifetime JPH0518880Y2 (en]) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518880Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714884B2 (ja) * | 2004-03-29 | 2011-06-29 | 独立行政法人国立循環器病研究センター | 粒子線加速器 |
| JP5010846B2 (ja) * | 2006-04-19 | 2012-08-29 | 株式会社日立製作所 | 加速器 |
| JP4790823B2 (ja) * | 2009-02-12 | 2011-10-12 | 住友重機械工業株式会社 | デフレクタ |
-
1985
- 1985-05-27 JP JP7891585U patent/JPH0518880Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61193700U (en]) | 1986-12-02 |
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